• History: Donation from Bell Labs, installed 1994 and refurbished 2007
• Materials:
• Er – Veeco 10CC high temperature source
• Ga – Veeco 400g SUMO cell
• In – Veeco 900g SUMO cell
• Al – Veeco 200g SUMO cell
• N – SVTA rf plasma source (Status: not installed)
• As – Veeco 500CC valved-cracker
• Sb – Veeco 200CC valved-cracker
• Bi – Veeco 250g downward-looking SUMO cell
• Si/Be – MBE Komponenten custom dual dopant source (Si filament and Be effusion)
• GaTe – MBE Komponenten tilted crucible dopant source
• Si – MBE Komponenten filament source
• Be – MBE Komponenten tilted crucible dopant source
• Ancillary Equipment:
• kSA multibeam optical stress (MOS) system
• kSA BandiT bandedge/blackbody temperature measurement
• Staib 15 keV RHEED system
• kSA RHEED analysis
• Stanford Research Systems RGA 300
• Veeco externally adjustable group-III shutters
• Riber (formerly MBE Control) AMBER growth software
• Veeco 3” substrate manipulator

• History: Purchased in 1995 by NIST, donated to LASE in 2008, refurbished in 2009
• Materials:
• B - MBE Komponenten EBVV vertical e-beam evaporator
• Ga – Veeco 400g SUMO cell
• In – Veeco 400g SUMO cell
• P – E-SCIENCE valved GaP decomposition source
• As – Veeco 500CC valved-cracker
• Bi – Veeco 250g downward-looking SUMO cell
• Si/Be – Veeco dual dopant source
• GaTe/Er - Veeco dual dopant source
• La – Veeco 10CC high temperature source (Status: not installed)
• Lu – Veeco 10CC high temperature source (Status: not installed)
• C – Veeco CBr₄ with MBE Control custom injector (Status: not installed)
• Al – Veeco 200g SUMO cell (Status: not installed)
• Gd – Veeco 10CC high temperature source (Status: not installed)
• Ancillary Equipment:
• kSA BandiT bandedge/blackbody temperature measurement
• MBE Control EZ-RHEED analysis
• Stanford Research Systems RGA 200
• Veeco externally adjustable group-III shutters
• Riber (formerly MBE Control) AMBER growth software
• Custom cryogen-free P-recovery system (Status: under installation)
• Veeco 3” substrate manipulator

• History: Donation from UT-Arlington in 2011
• Materials:
• Epitaxial plasmonic and emerging materials
• Ancillary Equipment:
• Thermionics 6-pocket e-beam evaporator
• Veeco dual dopant source
• MBE Komponenten cooling water nipple and shutter
• Stanford Research Systems RGA 200

• Outgassing MBE components prior to introducing them to the MBE system
• Equipment:
• CTI CT10 cryo
• Stanford Research Systems RGA 200
• Four 8" arms for baking sources
• One 10" arm for baking substrate manipulator
• Vertical group-III thermal deposition system (indium currently installed)

• Photoluminescence (PL): Measuring luminescence efficiency, emission wavelength, and so on
• near/mid-IR Reflection/Transmission (R&T): Measuring absorption and band-edge
• Pump/probe: Femtosecond carrier dynamics using mode-locked fiber laser
• Photoreflectance (PR): Measuring band alignments
• Ancillary equipment:
• LHe cryostat and controller

• FTIR: Bruker Vertex v80
• Vacuum FTIR with high resolution option (Δν < 0.06 cm^-1)
• Operating range: 5 - 25000 cm^-1 (0.4 – 2000 μm)
• Step scan
• Rapid scan
• IR Microscope: Bruker Hyperion 2000
• Coupled to FTIR for spatial/spectral/temporal mapping
• Single point MCT detector w/automated stage for imaging
• ZnSe A ttenuated Total Reflectance (ATR) objective (ZnSe)
• Grazing Angle Objective (GAO)
• Accessories:
• Keysight B1500A semiconductor device analyzer (1x high-power, 2x high-resolution SMUs)
• MMR variable temperature micro miniature refrigerator w/controller (under installation)

• CW, pulsed, and temperature-dependant EEL characterization
• Equipment:
• Vigo high-speed (ns) MCT detector (5μm cutoff)
• Thorlabs InGaAs amplified detector (1.5μm cutoff)
• Princeton Instruments Acton 2500 spectrometer
• Labsphere Infragold 2" integrating sphere with fiber port
• ILX Laser drivers - pulsed (LDP-3840B), CW/temperature (LDC-3744)
• ILX temperature-controlled laser mount (LDM-4415)
• Neslab recirculating chiller

• Spectrally-resolved photocurrent/photovoltage response
• Equipment:
• Stanford research systems lock-in amplifier and chopper
• Princeton Instruments Acton 2500 spectrometer
• Various light sources

• I-V: Tunnel junctions characterization and process flow diagnostics (e.g. TLM)
• Equipment:
• Micromanipulator 6200 probe station
• Keysight B1500A semiconductor device analyzer (1x high-power, 2x high-resolution SMUs)
• HP 4145 semiconductor parameter analyzer

• VASP (TACC) - Density Functional Theory (DFT)
• nextnano (Windows) - k.p, wavefunction solver, electrostatics, etc.
• RCWA (Windows) - Rigorous coupled-wave analysis; tool developed by Podolskiy Group, UML
• COMSOL (Windows) - Finite element method (FEM)
• Lumerical (Windows) - Finite-difference time-domain (FDTD) and FEM
• MEEP (Unix) - FDTD
• Monte Carlo (Unix) - APD simulations, including noise; tool developed by Campbell Group, UVA
• Band diagramming (Java and Python) - Poisson and Poisson-Schrodinger solvers, e.g. OpenBandParams

• Processing: III-V and Si processing (litho, ICP/RIE dry etch, metallization, etc), wafer bonding, lapping/polishing, wire bonding, etc.
• Characterization: HR-XRD (rotating anode Rigaku SmartLab), AFM, TEM, Hall Effect, PPMS, C-V, etc.

• Espresso - Illy Francis Francis! Model X7.1 IperEspresso Machine
• Pourover (6 cup) - Chemex Classic Series
• French Press (20 oz.) - Bodum Chambord (all-metal construction)
• Jura-Capresso Infinity (commercial-grade conical burr grinder)
• Dairy - Nespresso Aerocinno Plus

Last updated 08/07/2020